Susceptor Refurbishment

Susceptor Refurbishment

For Applied Materials P5000

 

Refurbishment of susceptors makes sense because some of the most expensive components have a very long life and may be reused many times, while only a few components get used up and require replacement. Thus refurbishment reduces cost by providing an increased materials efficiency.

Used susceptors are rebuilt to a virtually new condition, and ready to install. Critical components are replaced with new, and other parts are reconditioned. All assembly and packaging is done in a clean environment, so no special handling is needed prior to setup.

Quality assurance documents are provided with each susceptor for better tracking and control of materials. Gilbert Technical is a provider of support products and services for semiconductor industry equipment.

REFERENCE TABLE
0010-02862 150mm TEOS
0010-02863 150mm TEOS, BB
0010-03171 200mm TEOS
0010-03661 Universal TEOS
0010-09463 200mm TEOS, Screw
0010-09464 200mm Nitride, Screw
0010-10036 200mm TEOS, DCVD
0010-60011 150mm TEOS
0010-60015 150mm TEOS
0010-60018 150mm Nitride
0190-01429 200mm TEOS, Weld
0190-01430 150mm Nitride, Weld
0190-09399 150mm Nitride, Weld

COMPONENTS, NEW & REUSED
Aluminum Plate New
Ceramic parts Cleaned
Thermocouple New
Ground Cable Recondition
Inconel hardware Recondition
Other hardware New
Packaging Cleaned


Susceptor Refurbishment Steps

TC Noise Suppressor

Exclusive Product, Available Only at GTS

The Thermocouple Noise Suppressor is a broadband noise filter that improves accuracy of the temperature signal and helps prevent “Temp” errors during the RF clean cycle. Provides 180 Ohms @ 30Mhz