Susceptor Refurbishment

For Applied Materials P5000
Refurbishment of susceptors makes sense because some of the most expensive components have a very long life and may be reused many times, while only a few components get used up and require replacement. Thus refurbishment reduces cost by providing an increased materials efficiency.
Used susceptors are rebuilt to a virtually new condition, and ready to install. Critical components are replaced with new, and other parts are reconditioned. All assembly and packaging is done in a clean environment, so no special handling is needed prior to setup.
Quality assurance documents are provided with each susceptor for better tracking and control of materials. Gilbert Technical is a provider of support products and services for semiconductor industry equipment.
| REFERENCE TABLE | |
| 0010-02862 | 150mm TEOS |
| 0010-02863 | 150mm TEOS, BB |
| 0010-03171 | 200mm TEOS |
| 0010-03661 | Universal TEOS |
| 0010-09463 | 200mm TEOS, Screw |
| 0010-09464 | 200mm Nitride, Screw |
| 0010-10036 | 200mm TEOS, DCVD |
| 0010-60011 | 150mm TEOS |
| 0010-60015 | 150mm TEOS |
| 0010-60018 | 150mm Nitride |
| 0190-01429 | 200mm TEOS, Weld |
| 0190-01430 | 150mm Nitride, Weld |
| 0190-09399 | 150mm Nitride, Weld |
| COMPONENTS, NEW & REUSED | |
| Aluminum Plate | New |
| Ceramic parts | Cleaned |
| Thermocouple | New |
| Ground Cable | Recondition |
| Inconel hardware | Recondition |
| Other hardware | New |
| Packaging | Cleaned |


Exclusive Product, Available Only at GTS
The Thermocouple Noise Suppressor is a broadband noise filter that improves accuracy of the temperature signal and helps prevent “Temp” errors during the RF clean cycle. Provides 180 Ohms @ 30Mhz
